Phildal Holding Co., Ltd.
PHILDAL HOLDING CO., LIMITED is a professional provider located in Shanghai supplying high performance thin film materials.

We manufacture a wide range of sputtering targets to vacuum coating industry, and also provide evaporation materials according to customer requirements.

Due to our advanced production technology and strict testing system, we produce qualified sputtering targets and keep the quality consistency well. Besides, we have a variety of raw materials consistently in stock to help to achieve fast delivery. 

And furthermore, we will never stop our steps on R&D. We have good experience of developing new sputtering targets for our clients and get good feedback. We are glad to do our best to create helpful products. 

If you have any opinion or request, please don't hestate to contact us to discuss.




The materials of our sputtering targets including but not limited to following:

 Pure metal sputtering targets

Al: Aluminium Target

Mo: Molybdenum Target

B: Boron Target

Nb: Niobium Target

Bi: Bismuth Target

Ni: Nickel Target

Co: Cobalt Target

Sb: Antimony Target

Cr: Chromium Target

Sn: Tin Target

Cu: Copper Target

Sr: Strontium Target

Er: Erbium Target

Ta: Tantalum Target

Fe: Iron Target

Ti: Titanium Target

Gd: Gadolinium Target

V: Vanadium Target

Hf: Hafnium Target

W: Tungsten Target

In: Indium Target

Y: Yttrium Target

Mg: Magnesium Target

Zr: Zirconium Target

Mn: Manganese Target

 


 Alloy sputtering targets

Aluminium-Titanium Target: Al(60)Ti(40)at%

Aluminium-Titanium Target: Al(67)Ti(33)at%

Aluminium-Silicon Target: Al(99)Si(1)wt%

Aluminium-Chromium Target: Al(50)Cr(50)at%

Aluminium-Chromium Target: Al(60)Cr(40)at%

Aluminium-Copper Target: Al(99.5)Cu(0.5)wt%

Aluminium-Neodymium Target: Al(99)Nd(1)wt%

Chromium-Aluminium Target: Cr(60)Al(40)at%

Cobalt-Iron Target: Co(50)Fe(50)wt%

Cobalt-Iron-Boron Target: Co(60)Fe(20)B(20)at%

Copper-Nickel Target: Cu(55)Ni(45)wt%

Copper-Nickel Target: Cu(90)Ni(10)wt%

Copper-Zirconium Target: Cu(50)Zr(50)at%

Copper-Nickel-Manganese Target: Cu(54)Ni(45)Mn(1)wt%

Iron-Manganese Target: Fe(50)Mn(50)wt%

Iron-Tin Target: Fe(50)Sn(50)at%

Iron-Boron-Cobalt Target: Fe(70)B(20)Co(10)at%

Magnesium-Yttrium Target: Mg(95)Y(5)wt%

Magnesium-Zinc-Calcium Target: Mg(96.5)Zn(3)Ca(0.5)wt%

Manganese-Aluminium Target: Mn(60)Al(40)at%

Molybdenum-Niobium Target: Mo(90)Nb(10)wt%

Nickel-Indium Target: Ni(50)In(50)at%

Nickel-Chromium Target: Ni(80)Cr(20)wt%

Nickel-Chromium Target: Ni(90)Cr(10)wt%

Nickel-Iron Target: Ni(82)Fe(18)wt%

Nickel-Vanadium Target: Ni(93)V(7)wt%

Titanium-Niobium Target: Ti(52)Nb(48)wt%

Titanium-Aluminium-Vanadium Target: Ti(90)Al(6)V(4)wt%

Titanium-Silicon Target: Ti(85)Si(15)at%

Titanium-Silver Target: Ti(95)Ag(5)wt%

Tungsten-Copper Target: W(65)Cu(35)wt%

Tungsten-Titanium Target: W(70)Ti(30)at%

Tungsten-Titanium Target: W(90)Ti(10)wt%

Zirconium-Aluminium Target: Zr(70)Al(30)at%


Other compound sputtering targets

Al2O3: Aluminium oxide Target

SiC: Silicon carbide Target

AlN: Aluminium nitride Target

TiB2: Titanium diboride Target

B4C: Boron carbide Target

TiN: Titanium nitride Target

Bi2FeCrO6 Target

WC: Tungsten carbide Target

BiFeO3 Target

WC-12Co Target

BiMnO3 Target

YMnO3 Target

In2O3: Indium oxide Target

ZnO(95)Al2O3(5)wt%

ITO Target: In2O3(90)SnO2(10)wt%

ZnO(99.5)Al2O3(0.5)wt%

MoS2: Molybdenum disulfide Target

ZnO: Zinc oxide Target


For other materials or customizing specifications, please feel free to contact us via sales@phildal-targets.com